ETH Zurich Foundation, UNISERS


Ali Oezhan Altun

An automated analysis equipment for high-purity liquids

Impurities in the process liquids can introduce defects on the semiconductor chips reducing the fabrication yield. Semiconductors industry urgently needs a better metrology system to monitor critical impurities on all of the process liquids such as ultrapure water (UPW), high-purity acids and solvents on a number of locations on the liquid filtration and distribution systems.

UNISERS is developing a fully-automated equipment to identify and quantify a number of critical impurities on the target liquids with required sensitivity levels. A better impurity metrology will help the industry improve the process, reducing chip defects. Lower defect density improves the manufacturing yield as well as the reliability of the fabricated chips.

More on UNISERS on their website or in the video.